The couple have two children: toddler Elwood and Willow Rose, born last November.
Owen arrived with fellow Take That members Gary Barlow, Howard Donald and Jason Orange just after 4pm. The bandmates all wore black tux suits with white ties and red roses in their buttonholes.
It is understood the couple chose the remote Scottish location as they have enjoyed happy holidays in the area.
Wearing a white V-neck fitted gown, embellished with crystals, Ferguson arrived at Cawdor Parish Church 25 minutes late. Encircled by a flurry of photographers, Ferguson was assisted into the church by two bridesmaids, who were also wearing white.
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